Piezoresistive pressure sensors are pivotal components within the vast field of microelectromechanical systems (MEMS), integrating semiconductor physics with advanced fabrication techniques to detect ...
KYOTO, Japan--(BUSINESS WIRE)--Murata Manufacturing Co., Ltd. (TOKYO:6981) (ISIN:JP3914400001) (hereinafter "Murata") has developed newly capacitive type MEMS pressure (barometer) sensor (2.3 x 2.6 mm ...
Fig 1. The MEMS pressure sensor detects the tensile stress on a thin silicon membrane that changes the piezo-resistance of elements on the membrane’s surface. Fig 2. The MEMS sensor’s piezo-resistive ...
Accelerometers and gyroscopes didn’t attract much consumer notice until they found their way into smartphones where they help do things like switch a phone’s screen from vertical “portrait” mode to a ...
Do you know the word MEMS? This term, unfamiliar in Japan, is the acronym of Micro Electro Mechanical Systems. It has often been mentioned as micro machines in Japan since the 1990s, meaning minute ...
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Researchers develop novel dual-mode MEMS sensor for wide-range vacuum pressure detection
A research team led by Profs. Chen Deyong and Wang Junbo from the Aerospace Information Research Institute (AIR) of the Chinese Academy of Sciences has developed a novel microsensor that enhances both ...
MEMS sensors include accelerometers to measure linear acceleration and earth gravity vectors, gyroscopes to measure angular velocity, magnetometers to measure earth’s magnetic fields for heading ...
MEMS advances are set to transform the future of sensors and the mobile phone industry, according to Dr Josep Montanyà i Silvestre, CEO at Nanusens. Advances in MEMs technology are set to transform ...
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