In recent decades, the preparation of samples for transmission electron microscopes has transformed, thanks to the introduction of focused ion beam (FIB) instruments. Known as either single-beam or ...
What Is Electron Beam Lithography? Electron beam lithography (EBL) is a technique for creating high-resolution patterns on a semiconductor substrate by directing a beam of electrons to selectively ...
Combines a high-resolution field emission scanning electron microscope with gallium focused ion column capable of ion milling material at the nanoscale.
Electron-beam inspection is proving to be indispensable for finding critical defects at sub-5nm dimensions. The challenge now is how to speed up the process to make it economically palatable to fabs.
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